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Features & Benefits
 

• The MacLite Senior Series with junior function,transfers wafers between two 25 Slot Carriers and one 50 slot Process boat. Carriers/boats can beplastic, Teflon?, Quartz, Silicon Carbide, Polysilicon and metal boats.
   
• Fast & Smooth, featuring ramped speeds. A 50 wafer transfer is under 56 seconds.
   
• Operator interface is with a 12 key keypad with a 4 line LCD display.
• MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz.
   
• The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to
  achieve this figure).
   
• Single Board PC controlled.
    
• Sensors detect wafers and cassette or process carrier presence for safety.
   
• Flat alignment is maintained during transfer.
• Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
• All exposed aluminum parts are hard Black Anodized.
• Covers are powder covered aircraft grade aluminum.
• Uptime will exceed 99.95%.
             MTBF (mean time between failure): 2,500 hours
             MTBA (mean time between assist): 1,000 hours
             MTTR (mean time to repair): 1 hour

       Options

•  Vespel package for high temperature applications
•  Stainless steel covers.
•  Hot Wafer/Boat Sensor